Quartz Wafer Substrate
Quartz Wafer Substrates mawafer anonyanya kugadzirwa nepamusoro-purity quartz (SiO₂), anoshandiswa zvakanyanya musemiconductors, optoelectronics, micro-electromechanical systems (MEMS), optical devices, nezvimwe minda.
Tsanangudzo
Material Properties
- High Purity:Inowanzo gadzirwa kubva mukugadzira quartz (semuenzaniso, yakasanganiswa silica), ine kuchena kwakanyanya (Kukura kupfuura kana kuenzana ne99.99%) uye kusvibiswa kushoma kudzivirira kukanganisa kushanda kwechishandiso.
- Thermal Stability:Yakaderera coefficient of thermal expansion (≈0.55×10⁻⁶/ dhigirii) uye yakakwirira-kuramba tembiricha (kunyorovesa ~1600 degree), yakakodzera kune yakakwirira-maitiro ekupisa.
- Optical Performance:Broad transmitting range (UV to IR), ine yakasarudzika UV transmittance, yakanakira mafotomasks, lenzi, nezvimwe.
- Kemikari Inertness:Inopikisa acids uye alkalis (kunze kwehydrofluoric acid), inokodzera kunyorova etching maitiro.
- Electrical Insulation:High resistivity (>10¹⁶ Ω·cm), yakanakira insulating substrates kana -frequency devices dzakakwirira.
Applications
Semiconductor Manufacturing
- Zvikamu zvePhotomask
- EUV lithography zvikamu
- Wafer processing carriers
Photonics & Optoelectronics
- Optical waveguide substrates
- Kuiswa kwelaser diode
- Quantum computing components
Specialty Applications
- MEMS resonator mabhesi
- Space telescope optics
- High-laser masisitimu esimba
Manufacturing Process
- Raw Material Synthesis:Yakagadzirwa kuburikidza nemhepo deposition (semuenzaniso, SiCl₄ oxidation) kana kucheneswa kweyakasikwa quartz.
- Kunyunguduka uye Kuumba:Kunyanya-kunyungudika kwe tembiricha kunoteverwa nekutonhodza mumaingo kana kudhirowa kuita marods.
- Kucheka:Yakachekwa kuita zvitete zvitete uchishandisa diamond waya masaha kana laser yekucheka.
- Kukuya nekupukuta:Chemical mechanical polishing (CMP) inoita nanometer-level kutsvedzerera.
- Kuchenesa uye Kuongorora:Kubvisa zvimedu uye simbi zvinosvibisa, zvichiteverwa nekuremara uye parameter kuyedzwa.
Properties
|
Zvinhu Zvenyama |
Values |
|
Kuchena |
＞99.99% |
|
Density |
2.2g/cm3 |
|
Transparency |
＞90% |
|
Mohs Kuoma |
5.5--6.5 |
|
Deformation Point |
1280 degree |
|
Softening Point |
1750 degree |
|
Annealing Point |
1250 degree |
|
Chaicho Kupisa (20 - 350 dhigirii) |
670J/kg. degree |
|
Thermal Conductivity (20 degree) |
1.4W/m. degree |
|
Heat Conductivity (w/mk,1000 degree) |
1.0-1.2 |
|
Refractive Index |
1.4585 |
|
Coefficient of Thermal Expansion |
5.510 -7cm/cm. degree |
|
Kupisa - kushanda Temperature |
1750--2050 dhigirii |
|
Nguva pfupi - tembiricha yeSevhisi |
1450 degree |
|
Yenguva yakareba - yeTembiricha yeSevhisi |
1100 degree |
|
Chemical Properties |
Values |
|
Acid resistant |
Yakasimba Asidhi (kunze kweHF), Yakasimba alkali, organic mhinduro |
|
High tembiricha Corrosion resistance |
Excellent |
|
Metal Kusachena Content |
＜5 ppm |
|
Electrical Properties |
Values |
|
Resistivity |
7107Ω.cm |
|
Insulation Simba |
250~400Kv/cm |
|
Dielectric Constant |
3.7~3.9 |
|
Dielectric Absorption Coefficient |
＜410-4 |
|
Dielectric Loss Coefficient |
＜110-4 |
|
Mechanical Properties |
Values |
|
Compressive Strength |
1100MPa |
|
Bending Strength |
67MPa |
|
Tensile Simba |
48MPa |
|
Chiyero chePoisson |
0.14~0.17 |
|
Young's Modulus |
72000MPa |
|
Shear Modulus |
31000MPa |
FAQ
Q1: Ndeipi yakakura quartz wafer substrates saizi iripo?
A: Standard kugadzirwa kusvika 300mm dhayamita, pamwe 450mm prototypes iripo R&D.
Q2: Unogona here kupa customized ukobvu profiles?
A: Hongu - tinogona kugadzira:
- Wedged wafers (yekushandisa laser)
- Madhizaini akakwenenzverwa nemazvo
- Mesa-nzvimbo dzakarongwa
Q3: Ndeipi yekuchenesa protocol yaunokurudzira?
A: Standard RCA yakachena maitiro:
1. Kubvisa organic (H₂SO₄:H₂O₂)
2. Ionic kuchenesa (HCl:H₂O₂)
3. HF-yekupedzisira kune hydrophilic surface
Hot Tags: quartz wafer substrate, China quartz wafer substrate vagadziri, vatengesi, fekitari
Tumira Inquiry
Unogona zvakare Kuda
