Quartz Wafer Yekuchenesa Boat
A quartz wafer yekuchenesa chikepe chishandiso chinoshandiswa kuchenesa wafer mune semiconductor yekugadzira maitiro.
zvinhu: 99.99% quartz
Tsanangudzo
Features
- High tembiricha kuramba
- Corrosion resistance
- Pfeka kuramba
- Zviri nyore kuchenesa
Shandisa: bvisa zvinosvibisa pamusoro
Iva nechokwadi chekugadzira mhando ye semiconductor machipisi.
Application
1. Pre-Diffusion Cleaning
Inoshandiswa kutakura mawafer kuburikidza nebhenji rakanyorova kana nhanho dzekuchenesa (semuenzaniso, RCA yekuchenesa) kubvisa organic, simbi, uye tunhu zvinosvibisa pamberi-tembiricha diffusion kana oxidation maitiro.
2. Post-CMP (Chemical Mechanical Planarization) Kuchenesa
Inobata mawafer panguva yeposi{{0}kupolishing cleans kubvisa tsvina ine tsvina uye kuremara kwepamusoro, kuve nechokwadi chekuti flatness yakakwana pamatanho anotevera.
3. Mberi-Kuguma-kwe-Mutsetse (FEOL) Kugadzirwa
Inoshandiswa mumatanho akakosha ekuchenesa FEOL panodiwa zvakanyanya-nzvimbo dzakachena pakukura kwegedhi, epitaxial deposition, kana ion implantation.
4. Kumashure-Kuguma{{2}kwe-Mutsetse (BEOL) Kugadzira
Inotsigira mawafer panguva yeposi-etch kana post{1}}deposition yekuchenesa kubvisa photoresist, etch byproducts, uye tsvina yesimbi mushure mekugadzirwa kweinterconnect.
5. Advanced Packaging
Inofambisa wafer-level kuchenesa usati waita dicing kana kuti bonding mu 2.5D/3D IC package, tichiona kusvibiswa{{3}mapaburi emahara ekubatanidza akavimbika.
6. Photovoltaic Manufacturing
Inoshandiswa mukugadzira masero ezuva kuchenesa silicon substrates, inosimudzira pamusoro pemhando yekuvandudza kunyudzwa kwemwenje uye kushandura simba.
Properties
|
Zvinhu Zvenyama |
Values |
|
Kuchena |
＞99.99% |
|
Density |
2.2g/cm3 |
|
Transparency |
＞90% |
|
Mohs Kuoma |
5.5--6.5 |
|
Deformation Point |
1280 degree |
|
Softening Point |
1750 degree |
|
Annealing Point |
1250 degree |
|
Chaicho Kupisa (20 - 350 dhigirii) |
670J/kg. degree |
|
Thermal Conductivity (20 degree) |
1.4W/m. degree |
|
Heat Conductivity (w/mk,1000 degree) |
1.0-1.2 |
|
Refractive Index |
1.4585 |
|
Coefficient of Thermal Expansion |
5.510 -7cm/cm. degree |
|
Kupisa - kushanda Temperature |
1750--2050 dhigirii |
|
Nguva pfupi - tembiricha yeSevhisi |
1450 degree |
|
Yenguva yakareba - yeTembiricha yeSevhisi |
1100 degree |
|
Chemical Properties |
Values |
|
Acid resistant |
Yakasimba Asidhi (kunze kweHF), Yakasimba alkali, organic mhinduro |
|
High tembiricha Corrosion resistance |
Excellent |
|
Metal Kusachena Content |
＜5 ppm |
|
Electrical Properties |
Values |
|
Resistivity |
7107Ω.cm |
|
Insulation Simba |
250~400Kv/cm |
|
Dielectric Constant |
3.7~3.9 |
|
Dielectric Absorption Coefficient |
＜410-4 |
|
Dielectric Loss Coefficient |
＜110-4 |
|
Mechanical Properties |
Values |
|
Compressive Strength |
1100MPa |
|
Bending Strength |
67MPa |
|
Tensile Simba |
48MPa |
|
Chiyero chePoisson |
0.14~0.17 |
|
Young's Modulus |
72000MPa |
|
Shear Modulus |
31000MPa |
Nzira dzekuchenesa
Kuchenesa mumvura:
Isa chidimbu muchikepe chekuchenesa, wozonyura chikepe chekuchenesa mumvura yekuchenesa, uye wedzera kusangana pakati pemvura yekuchenesa uye nzvimbo yakasvibirira nekusimudza chikepe chekuchenesa kuti uvandudze maitiro ekuchenesa.
Spray kuchenesa:
Misa chikepe chekuchenesa chakamira mukamuri yekupfapfaidza, uye shandisa muromo kupfapfaidza mvura yekuchenesa pawaferi kuti ubvise zvinosvibisa. ...
Kukosha kwekuchenesa mabhoti:
- Ita shuwa kuchena kwewaferi: Yakachena wafer pamusoro yakakosha pakugadzirwa kwemhando yesemiconductor machipisi, uye chikepe chekuchenesa chinoita basa rakakosha mukuchenesa.
- Ita shuwa kuvimbika kwesemiconductor machipisi: Ita shuwa kuvimbika kwemachipisi uye kuderedza kukanganisa kwechigadzirwa nekubvisa zvinosvibisa pamusoro.
- Kuvandudza goho rema semiconductor machipisi: Kuvandudza hutsanana hwema wafers, nekudaro kuvandudza goho rema semiconductor chips.
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